JPS6231866Y2 - - Google Patents

Info

Publication number
JPS6231866Y2
JPS6231866Y2 JP17663084U JP17663084U JPS6231866Y2 JP S6231866 Y2 JPS6231866 Y2 JP S6231866Y2 JP 17663084 U JP17663084 U JP 17663084U JP 17663084 U JP17663084 U JP 17663084U JP S6231866 Y2 JPS6231866 Y2 JP S6231866Y2
Authority
JP
Japan
Prior art keywords
gas
sealed
tube
circulation path
sealed container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17663084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60111246U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17663084U priority Critical patent/JPS60111246U/ja
Publication of JPS60111246U publication Critical patent/JPS60111246U/ja
Application granted granted Critical
Publication of JPS6231866Y2 publication Critical patent/JPS6231866Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP17663084U 1984-11-22 1984-11-22 密封管又は密封容器の気体循環路中の気体漏洩量測定装置 Granted JPS60111246U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17663084U JPS60111246U (ja) 1984-11-22 1984-11-22 密封管又は密封容器の気体循環路中の気体漏洩量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17663084U JPS60111246U (ja) 1984-11-22 1984-11-22 密封管又は密封容器の気体循環路中の気体漏洩量測定装置

Publications (2)

Publication Number Publication Date
JPS60111246U JPS60111246U (ja) 1985-07-27
JPS6231866Y2 true JPS6231866Y2 (en]) 1987-08-15

Family

ID=30734226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17663084U Granted JPS60111246U (ja) 1984-11-22 1984-11-22 密封管又は密封容器の気体循環路中の気体漏洩量測定装置

Country Status (1)

Country Link
JP (1) JPS60111246U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014205032A1 (de) * 2014-03-18 2015-09-24 Inficon Gmbh Dichteanstiegsmessung in Folienkammer

Also Published As

Publication number Publication date
JPS60111246U (ja) 1985-07-27

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